New Technology Measures Trace Moisture in Nitrogen Process Gas Streams
PORT WASHINGTON, NY, July 9, 2014 – Pall Corporation today introduced the Gaskleen® Pico1000 Analyzer for moisture in nitrogen. The new technology was introduced at SEMICON West in San Francisco.
The new Gaskleen Pico1000 analyzer measures trace moisture in nitrogen process gas streams, with a limit of detection of 1 part per billion (ppb). It is ideally suited for qualifying and certifying ultra-high purity (UHP) process gas lines, as well as for detecting end-of-life when deployed downstream of a purifier.
“Featuring its patented MEMS sensor, the Gaskleen Pico1000 analyzer delivers a step change in price / performance to any customer who needs to control moisture in nitrogen,” said Jan-Paul van Maaren, PhD, vice president of strategic marketing, Pall Microelectronics. “Where measuring moisture was cumbersome or uneconomical in the past with traditional technologies such as APIMS and CRDS, the Pico 1000 analyzer makes it accurate, simple, and affordable.”
The robust, compact design of the analyzer makes it readily portable, allowing users to easily move it around the fab for quick checks of process gas quality at many points. In addition, the Pico1000 analyzer consumes up to 70 percent less process gas compared to competitive analyzers, and for significantly lower cost than competitive systems.